ME 6555 - Nanofabrication Technology

The course topics include Micro/nano lithography, nanostructured layer deposition, electroforming of nanostructures, electron, ion and x-ray beam lithographies, alternative lithography technologies, carbon nanotubes fabrication, nanowires, characterization of nanostructures.

Prerequisites/Corequisites: Prerequisites:  ME 5500 or ME 5730 or instructor approval.

Credits 3 hours

Open to Graduate students only.

Lecture Hours - Laboratory Hours

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