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    Western Michigan University
   
 
  Jul 24, 2017
 
 
    
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Graduate Catalog 2013-14 [ARCHIVED CATALOG]

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ME 6555 - Nanofabrication Technology


The course topics include Micro/nano lithography, nanostructured layer deposition, electroforming of nanostructures, electron, ion and x-ray beam lithographies, alternative lithography technologies, carbon nanotubes fabrication, nanowires, characterization of nanostructures.

Prerequisites/Corequisites: Prerequisites:  ME 5500 or ME 5730 or instructor approval.

Credits: 3 hours

Notes: Open to Graduate students only.
Lecture Hours - Laboratory Hours: (3-0)



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