Mar 28, 2024  
Graduate Catalog 2014-15 
    
Graduate Catalog 2014-15 [ARCHIVED CATALOG]

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ECE 5240 - Introduction to VLSI Technology


A course in VLSI semiconductor devices, modern CMOS technology, crystal growth, fabrication, and basic properties of silicon wafers. It will focus on lithography, thermal oxidation, (Si/Si)2, interface, dopant diffusion, ion implantation, thin film deposition, etching, and back-end technology.

Credits: 3 hours

Notes: This course is restricted to graduate students in either Computer Engineering or Electrical Engineering.



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