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Mar 29, 2024
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ME 6555 - Nanofabrication Technology The course topics include Micro/nano lithography, nanostructured layer deposition, electroforming of nanostructures, electron, ion and x-ray beam lithographies, alternative lithography technologies, carbon nanotubes fabrication, nanowires, characterization of nanostructures.
Prerequisites/Corequisites: Prerequisites: ME 5500 or ME 5730 or instructor approval.
Credits: 3 hours
Notes: Open to Graduate students only. Lecture Hours - Laboratory Hours: (3-0)
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