ECE 5240 - Introduction to VLSI Technology

A course in VLSI semiconductor devices, modern CMOS technology, crystal growth, fabrication, and basic properties of silicon wafers. It will focus on lithography, thermal oxidation, (Si/Si)2, interface, dopant diffusion, ion implantation, thin film deposition, etching, and back-end technology.

Credits: 3 hours

Restrictions: This course is restricted to graduate students majoring in either Computer Engineering or Electrical Engineering. Senior undergraduates may take this course with department approval.