ECE 5450 - Micro Electro Mechanical Systems

This course introduces students to rapidly emerging, multi-disciplinary, and exciting field of Micro Electro Mechanical Systems (MEMS). It will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. Skills needed for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach nasic techniques for multi-domain analysis (e.g., electromechanical, electrothermal). Fundamentals of sensing and transductionmechanisms (i.e. conversion of non-electronic signals to electronic signals), including capacitive and piezoresistive techniques, and design and analysis of micromachined miniature sensors and actuators using these techniques will be covered. Many examples of existing devices and their applications will be reviewed.

Credits: 3 hours

Restrictions: This course is restricted to graduate students majoring in either Computer Engineering or Electrical Engineering. Senior undergraduates may take this course with department approval.

Notes: Open to Upperclass and Graduate students only.
When Offered: Fall