Jul 12, 2024  
Graduate Catalog 2018-19 
Graduate Catalog 2018-19 [ARCHIVED CATALOG]

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ECE 5450 - Micro Electro Mechanical Systems

This course introduces students to the rapidly emerging, multi-disciplinary, and exciting field of Micro Electro Mechanical Systems (MEMS). It will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. The course will cover skills needed for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis (e.g., electromechanical, electrothermal). Fundamentals of sensing and transduction mechanisms (i.e. conversion of non-electronic signals to electronic signals), including capacitive and piezoresistive techniques, and design and analysis of micromachined miniature sensors and actuators using these techniques will be covered. Many examples of existing devices and their applications will be reviewed.

Credits: 3 hours

Restrictions Restricted to graduate students in electrical or computer engineering.
Notes: Open to Graduate students only.
When Offered: Fall

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