ME 6555 - Nanofabrication Technology

The course topics include Micro/nano lithography, nanostructured layer deposition, electroforming of nanostructures, electron, ion and x-ray beam lithographies, alternative lithography technologies, carbon nanotubes fabrication, nanowires, characterization of nanostructures. Students must complete the prerequisite or have the instructor’s approval.

Prerequisites/Corequisites: Prerequisites: ME 5500 or ME 5730 or instructor approval.

Credits: 3 hours

Notes: Open to graduate students only.