ECE 6450 - Advanced Micro Electro Mechanical Systems

This course covers advanced topics dealing with MEMS technologies, transduction mechanisms, and microfabricated sensors and actuators. Many emerging micromachining technologies such as laser and electro-discharge machining, and non-conventional materials such as SiC and diamond are discussed. Transduction techniques, including electromagnetic, piezoelectric, resonant, tunneling, and others are presented (to the extent permitted by time available). The course reviews different types of sensors for measurement of physical parameters such as acceleration, rotation rate. It also reviews different micro-actuation techniques and their applications in MEMS.

Note: May be repeated for credit. Open to graduate students only.

Prerequisites/Corequisites: Prerequisite: ECE 5450 or instructor approval

Credits: 3 hours